SEMICONDUCTOR SENSOR

摘要

PROBLEM TO BE SOLVED: To prevent the influence of a stress on a pressure detection characteristic of a sensor element. SOLUTION: A semiconductor sensor is provided with the sensor element 6 supporting a semiconductor sensor chip 1 and leading out a sensor element terminal 7 and a base board 8 provided with a sensor element terminal fixing part 8a for fixing the sensor element terminal 7 and an external connection terminal fixing part 8b for fixing an external connection terminal 12. In the base board 8, a connection terminal stress reducing part 8d reducing a connection terminal stress transmitted via the external connection terminal 12 is arranged between the sensor element terminal fixing part 8a and the external connection terminal fixing part 8b.