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发明名称
CERAMIC FILM AND METHOD FOR ITS PREPARATION, AND SEMICONDUCTOR DEVICE AND PIEZOELECTRIC ELEMENT
摘要
申请公布号
KR20020027564(A)
申请公布日期
2002.04.13
申请号
KR1020027002203
申请日期
2002.02.20
申请人
发明人
分类号
H01L41/187;C01G1/00
主分类号
H01L41/187
代理机构
代理人
主权项
地址
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