发明名称 |
Acoustic microscopy die crack inspection for plastic encapsulated integrated circuits |
摘要 |
A novel method of non-destructive die crack inspection of a plastic encapsulated integrated circuit (PEIC) uses a scanning acoustic microscope, such as a C-mode scanning acoustic microscope. To generate scan of a die surface of the PEIC, the width of a data gate of the microscope is set to scan only the die surface. Then, the data gate is moved to cover only die subsurface reflection area on a screen of the microscope, and scan of the die subsurface is generated.
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申请公布号 |
US6374675(B1) |
申请公布日期 |
2002.04.23 |
申请号 |
US20000531426 |
申请日期 |
2000.03.20 |
申请人 |
ADVANCED MICRO DEVICES, INC, |
发明人 |
DEPETRILLO KEVIN MICHAEL |
分类号 |
G01N29/06;G01N29/22;G01S7/52;(IPC1-7):G01N29/00 |
主分类号 |
G01N29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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