| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-precision decision value in a semiconductor test method substituting operation measurement of a circuit operating at a low speed for high-speed operation measurement. SOLUTION: In this test method, experimental data showing correlation between the low-speed operation measurement and the high-speed operation measurement under plural conditions are prepared in advance. By actually measuring a semiconductor device through STEP10-STEP12, measurement data predicting a state in high-speed operation measurement is obtained. A standard decision value for the low-speed operation measurement corresponding to the high-speed measurement is calculated through STEP13-STEP17 on the basis of the experimental data and measured data, and the low-speed operation measurement is executed on the basis of the standard decision value.
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