DRYING METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and device of completely drying an object to be dried such as a shipping box and the like used for storing a semiconductor wafer having a complicated structure and transporting it for a short time. SOLUTION: An object to be dried is allowed to rotate during revolution in a method of allowing the object to be dried to revolve and drying it by a centrifugal force.