| 摘要 |
PROBLEM TO BE SOLVED: To accurately inspect a flow rate, in which the pressure difference of a material to be inspected is measured by a simple method in a method for inspecting the flow rate, and to accurately inspect flow rate without depending upon the structure, installing place or the like of the material in an apparatus for inspecting the flow rate. SOLUTION: The apparatus 1 for inspecting the flow rate comprises a gas supply means 2 for supplying a gas, throttle means 40 and 41, switching means 30 and 31 for respectively switching the means 40 and 41, pressure difference measuring means 50 and 51 for respectively measuring gas pressure difference before and after the means 40 and 41, and an inspecting passage 8 for coupling the means 2, the means 40, 41 and materials 11, 12 and 16 in series.
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