| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring microscope which suppresses the occurrence of a side slipping phenomenon of an object to be inspected, contrives the reliability of measurement and the improvement of throughput and enables the measurement of external shape of whole of the object to be inspected without using a specified sample fixture. SOLUTION: This measuring microscope is provided with a stage 9 which mounts the object S to be inspected, accurately reads the amount of travel and enables the transmission observation, illuminating means 21, 22, 23 and 41 which are disposed on the lower side of the object to be inspected across the stage 9 and illuminate the object S to be inspected and observation means 10, 50 and 60 which are disposed on the upper side of the object S to be inspected and have objective lens 10 and image forming lens 51 of one piece or more. Therein, the surface for mounting the object to be inspected of the stage 9 is constituted with a high friction member 1 which transmits the transmission illuminating light.
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