| 发明名称 |
Accelerometer with re-entrant grooves |
| 摘要 |
An accelerometer for measuring seismic data. The accelerometer includes a measurement mass assembly having top and bottom electrodes, a top capacitor electrode, and bottom capacitor electrode. One or more of the electrodes include re-entrant openings formed in the surface of the electrodes.
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| 申请公布号 |
US2002104379(A1) |
申请公布日期 |
2002.08.08 |
| 申请号 |
US20010867286 |
申请日期 |
2001.05.29 |
| 申请人 |
INPUT/OUTPUT, INC. |
发明人 |
RIED ROBERT;SELVAKUMAR ARJUN;GOLDBERG HOWARD;SCHMIDT MARTIN;YU LIANZHONG |
| 分类号 |
B81B3/00;B81C1/00;G01P1/02;G01P15/08;G01P15/125;G01V1/18;(IPC1-7):G01P15/125 |
主分类号 |
B81B3/00 |
| 代理机构 |
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代理人 |
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