| 摘要 |
PROBLEM TO BE SOLVED: To provide a matching point distance detecting and correcting device, which can make matching conditions realized accurately in a short time, by minimizing the influence of diversification of loads of a high-frequency power supply and the influence of dependency of sensor characteristics of progressive wave power and reflected wave power on power and frequency, and also to provide a method of controlling the same. SOLUTION: In an AC power supply equipment, where a high-frequency power supply and a matching device are connected in series, the matching point distance detecting and correcting device calculates the reflected wave power constant of the progressive wave power and reflected wave power, which are detected by a high-frequency power detector, by means of a reflected wave power constant calculating unit, then obtains the obtained signal through a power compensation process to obtain a matching point distance having linearity, and then controls motors of two variable capacitors in a matching circuit by a drive circuit, for making the matching point distance zero.
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