发明名称 |
Method and apparatus for automating a microelectric manufacturing process |
摘要 |
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.
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申请公布号 |
US6470227(B1) |
申请公布日期 |
2002.10.22 |
申请号 |
US19980204421 |
申请日期 |
1998.12.02 |
申请人 |
RANGACHARI MURALI D.;SHARMA ARUN KUMAR;BALAKRISHNAN RAMESH;PITCHAIKANI BALAJI |
发明人 |
RANGACHARI MURALI D.;SHARMA ARUN KUMAR;BALAKRISHNAN RAMESH;PITCHAIKANI BALAJI |
分类号 |
G05B19/418;G06F9/44;G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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地址 |
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