Scanning laser beam electrical circuit inspection system

摘要

An automated optical inspection system is operative to convey an electrical circuit to be inspected in a first direction. While the electrical circuit is being conveyed a laser beam scanner scans a laser beam in second direction, generally perpendicular to the first direction, and a fluorescence detector detects fluorescence produced by impingement of the laser beam on portions of the electrical circuit. The fluorescence detector receives fluorescence sequentially from portions of the electrical circuit illuminated by the laser beam as a result of both conveying of the electrical circuit and scanning of the laser beam in the second direction.