| 摘要 |
PROBLEM TO BE SOLVED: To provide an information detector with a scanning probe which permits the detection of information with a higher accuracy in a wider range surpassing a fine motion area, where the realization of higher resolutions is sought with a simple structure and a processor and a surface observation device built using the same and an information detecting method with the scanning probe. SOLUTION: In the information detector or detection method with the scanning probe designed to detect information on a sample by performing a relative scanning on the sample with a probe, there is arranged a coarse motion mechanism which permits coarse motions surpassing the operation range of the fine motion mechanism for realizing the higher resolutions, the probe is moved relative to the sample so as to make adjacent fine motion ranges overlap each other based on the degree of the motion error assumed for the process of coarse motions, and a surface measurement of the overlapped parts is carried out. Thus, the degree of the error is corrected based on the result of the surface measurement.
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