| 摘要 |
PROBLEM TO BE SOLVED: To obtain a heat treatment system having a load lock chamber in which the size of the load lock chamber is reduced, contamination of a substrate is prevented in the load lock chamber, fabrication cost is reduced, treatment quality is enhanced and running cost is lowered. SOLUTION: The heat treatment system comprises a reaction tube 30, a boat 17 for holding a substrate, a boat cap 16 for mounting the boat, a load lock chamber 26, a cap elevator 35, and a boat elevator wherein the cap elevator and the boat elevator have a shaft 42 being driven from the outside of the load lock chamber to move the cap and the board up and down. The cap elevator and the boat elevator can move up and down and turn the boat cap and the boat in the load lock chamber through the up/down shaft and the boat can be transferred between the cap held on the cap elevator and the boat elevator through cooperation of elevating/lowering and turning of the cap elevator and the boat elevator. |
