发明名称 |
TEMPERATURE-CONTROLLED CHUCK AND METHOD FOR CONTROLLING THE TEMPERATURE OF A SUBSTANTIALLY FLAT OBJECT |
摘要 |
The present invention generally relates to a method for controlling the temperature of a substantially flat object and to a temperature-controlled chuck comprising a chuck body (20) having an object support side (21) and a back side (22). Said object support side (21) holds a substantially flat object (1) having a front side (2) and a back side (3) on said back side (3) of said object (1). A plurality of temperature sensing elements (4) is distributed on said object support side (1) to measure the temperature distribution of said flat object (1). A plurality of individual temperature influencing elements (6; 8; 9) is distributed on said object support side (21) to face said back side (3) of said flat object (1), each of said temperature influencing elements (6; 8; 9) being arranged to influence the temperature of a partial area of said object's back side (3) as desired.
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申请公布号 |
US2002179585(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20010871854 |
申请日期 |
2001.05.31 |
申请人 |
MOTOROLA, INC. |
发明人 |
MALTABES JOHN G.;CHARLES ALAIN B.;MAUTZ KARL E. |
分类号 |
H01L21/027;H01L21/00;(IPC1-7):H05B3/68;F27D11/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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