发明名称 |
Electrostatic microactuator with viscous liquid damping |
摘要 |
A micro-electro-mechanical systems (MEMS) type electrostatic microactuator has a fixed electrode and a movable electrode, with the movable electrode being attached to the substrate by a flexure. Each electrode has a plurality of fingers with the fixed electrode fingers and the movable electrode fingers interleaved in a comb-like arrangement. A nonconductive viscous liquid is located between the fingers for damping motion of the movable electrode relative to the fixed electrode. The liquid is held in a reservoir attached to the movable electrode. Capillary pressure pulls the liquid from the reservoir into the small gaps between the interleaved fingers.
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申请公布号 |
US6495944(B2) |
申请公布日期 |
2002.12.17 |
申请号 |
US20010838088 |
申请日期 |
2001.04.18 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HIRANO TOSHIKO;KERCHER DAN S.;MATE CHARLES M. |
分类号 |
H02N1/00;(IPC1-7):H02N1/00 |
主分类号 |
H02N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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