发明名称 |
Intermediate liquid crystal display device product having an end point detection window, method of fabrication and method of detecting etching end point |
摘要 |
In a partially formed liquid crystal display device, a window definition layer defines an etching endpoint detection window over a dummy pattern formed on the substrate. The window definition layer also defines an etch window over a real pattern formed on the substrate. The real pattern and the dummy pattern have the same thickness. During an etching process, a reactant from the etching step is monitored to determine when to stop the etching process.
|
申请公布号 |
US6496242(B1) |
申请公布日期 |
2002.12.17 |
申请号 |
US20000640859 |
申请日期 |
2000.08.18 |
申请人 |
LG. PHILIPS LCD CO., LTD. |
发明人 |
MOON KYO HO |
分类号 |
G02F1/1362;(IPC1-7):G02F1/134;C23F1/00;C30B33/00;G02F1/13 |
主分类号 |
G02F1/1362 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|