| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact high-pressure processing apparatus, where one portion can be installed in a clean room, and high-pressure processing can be conducted stably. SOLUTION: A high-pressure processing apparatus for bringing an object to be treated, into contact with high-pressure fluid and chemical liquid other than the high-pressure fluid under pressurization, and removing an unwanted substances on the body to be treated has a plurality of high-pressure processing chambers 30 and 31, a common high-pressure fluid supply means 1 for supplying the high-pressure fluid to each high-pressure processing chamber, common chemical liquid supply means 2A and 2B for supplying chemical liquid to each high- pressure processing chamber, and a separation means 4 for separating a gas constituent from the mixture of the high-pressure fluid being discharged form the high-pressure processing chamber, after the cleaning processing of the body to be treated and the chemical liquid.
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