METHOD AND DEVICE FOR CONTROLLING POSITION

摘要

PROBLEM TO BE SOLVED: To provide a position control method and device which is resistant to an external disturbance such as vibrations and which can realize highly precise positioning. SOLUTION: A table member can be relatively moved in a prescribed direction to a base member and has a screw part, and the base member has a rotatably fixed screw shaft to be fit into the screw part of the table member. The screw shaft is rotated by a motor so that the table member can be displaced along the screw shaft. The screw shaft is elastically deformed in a twisting direction by rotating the motor, and the table member is displaced while the screw shaft is being elastically deformed. At the time of stopping the motor, the screw shaft is held in a state the screw shaft is elastically deformed.