发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR PRESSURE DETECTOR AND FLUID INJECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor pressure detector having output characteristics of high accuracy, and a fluid injection device capable of injecting a predetermined constant weight of a fluid. SOLUTION: An oil injection device 31 is equipped with a storage tank 32 for storing silicone oil S, and the silicone oil S is supplied to a dispenser 33 from the storage tank 32 through supply piping 35. When the CPU 39 of a control unit 34 inputs an input signal from a starter switch 43, the temperature of the oil S is detected by the temperature sensor 36 provided to the supply piping 35 according to the control program of an ROM 41. The CPU 39 controls the quantity of rotation of the motor 38 of the dispenser 33 on the basis of the detected temperature and a predetermined constant weight, and volume of the oil S is sent out to the recessed part 12d of a sensor housing 12 from the Mono pump 37 of the dispenser 33.
申请公布号 JP2003035619(A) 申请公布日期 2003.02.07
申请号 JP20010222100 申请日期 2001.07.23
申请人 TOYODA MACH WORKS LTD 发明人 AIKI YASUNORI;HIROMURA HIROSHI
分类号 G01L19/06;H01L29/84;(IPC1-7):G01L19/06 主分类号 G01L19/06
代理机构 代理人
主权项
地址