APPARATUS FOR JUDGING ABNORMALITY OF PRESSURE SENSOR AND RECORDING MEDIUM HAVING PROGRAM FOR JUDGING ABNORMALITY OF PRESSURE SENSOR RECORDED THEREON

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for judging the abnormality of a pressure sensor capable of accurately and inexpensively judging the abnormality of the pressure sensor alone, and a recording medium having a program for judging the abnormality of the pressure sensor recorded thereon. SOLUTION: A cut-off valve 5 is provided on the upstream side of the pressure sensor 4 and a gas supply passage 2 toward the downstream side is cut off by closing the cut-off valve 5. When the cut-off valve becomes a closed state and the gas supply passage on the downstream side of the cut-off valve is opened, the pressure in the gas supply passage 2 becomes equal to atmospheric pressure. An abnormality judge means 1 judges the abnormality of the pressure sensor 4 on the basis of the comparison of the pressure signal S2 actually outputted by the pressure sensor 4 with the reference value of the pressure signal S2 to be outputted by the pressure sensor 4, when the pressure in the gas supply passage 2 is set to atmospheric pressure.