| 摘要 |
A micro-electromechanical system (MEMS) is described for economical sensing of angular accelerations, especially for use in biomechanical applications. The device design is inspired by that of the semi-circular canals of the inner ear, utilizing a fluid filled channel and differential pressure transducer. Using modem fabrication techniques, very sensitive angular acceleration instruments may be realized. By combining these fast response sensors with other sensors, such as DC response linear accelerometers, allows broader frequencies of human motion to be monitored.
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