| 摘要 |
PURPOSE: A semiconductor fabricating apparatus is provided to extend the lifetime of a bellows and prevent a clamp from being twisted by precisely performing up and down operations of the clamp and preventing the clamp from being vibrated by abrasion. CONSTITUTION: A process chamber(110) is prepared. A wafer is placed on a susceptor(112) installed in the process chamber. A lift unit(120) has a lift pin(122) for loading/unloading the wafer into/from the susceptor. A clamping unit(130) settles and fixes the wafer loaded into the susceptor. A clamp ring(132) is prepared. A shaft(134) vertically moves, vertically installed in the clamp ring. A driving unit(136) vertically drives the shaft. The bellows(138) reiterates contraction and relaxation, connected to the shaft to prevent air from being introduced from the outside. A guide unit guides transfer of the shaft, installed in the bellows. The clamping unit includes the clamp ring, the shaft, the driving unit, the bellows and the guide unit.
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