| 摘要 |
PROBLEM TO BE SOLVED: To cope with increase of the number of test ICs testable in one period and the number of input/output pins of the test ICs without increasing the number of channel circuits of a semiconductor testing device. SOLUTION: A switching circuit 14 is installed relative to the channel circuit 15 constituted of a driver circuit and a comparator circuit. A plurality of connection terminals are provided in the switching circuit, and the input/output pins of the test ICs are connected to each connection terminal. A switch of the switching circuit is connected to one connection terminal following a control signal inputted from a switching control circuit 13, and the input/output pin connected to the connection terminal is conducted with the channel circuit, to thereby perform the test. Then, the switch of the switching circuit is connected to the other connection terminal by a control signal of the switching control circuit 13, and the test is performed relative to the input/output pin connected to the connection terminal.
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