| 发明名称 |
Infrared detector and method of making the infrared detector |
| 摘要 |
An infrared detector includes an optical cavity structure with an infrared reflection film on a semiconductor substrate. The infrared reflection film and an infrared absorption film provide high efficiency infrared detection.
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| 申请公布号 |
US6552344(B1) |
申请公布日期 |
2003.04.22 |
| 申请号 |
US20000631988 |
申请日期 |
2000.08.03 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
SONE TAKANORI;ISHIKAWA TOMOHIRO;NAKAKI YOSHIYUKI |
| 分类号 |
H01L27/14;G01J5/10;G01J5/20;(IPC1-7):G01J5/02 |
主分类号 |
H01L27/14 |
| 代理机构 |
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