OPTICAL SCOPE FOR INSPECTING SEMICONDUCTOR WAFER

摘要

PURPOSE: An optical scope for inspecting a semiconductor wafer is provided to be capable of selectively using the first light source of visible rays spectrum or the second light source of ultraviolet rays spectrum. CONSTITUTION: A wafer(80) is loaded on a wafer stage(110). The wafer(80) is magnified and demagnified to a predetermined magnification by an optical projection part(130). The wafer(80) is examined by a detector(190) through the optical projection part(130). A light beam generated from the first light source(160) of visible rays spectrum or the second light source(170) of ultraviolet rays spectrum, is projected into the optical projection part(130). A plurality of reflectors(150) are located between the wafer(80) and the detector(190) for reflecting the light beam of the first or second light source. At this time, the first or second light source is selected by a switching unit(186).