A device for the deposition of semiconductor thin films and a process therefor,申请号IN1995DE54419-传众专利搜索

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发明名称	A device for the deposition of semiconductor thin films and a process therefor
摘要
申请公布号	IN190030(B)	申请公布日期	2003.05.31
申请号	IN1995DE54419	申请日期	1995.03.27
申请人	COUNCIL OF SCIENTIFIC AND INDUSTRIAL RESEARCH	发明人	MONDAL ANUP;MUKHERJEE DIPANKAR;MUKHERJEE, MANISH, K.
分类号	B28D5/00;(IPC1-7):B28D5/00	主分类号	B28D5/00
代理机构		代理人
主权项
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