| 摘要 |
PURPOSE: A development solution nozzle device is provided to divide the pressure for supplying a development solution uniformly by using a bar-shaped spacer formed with a plurality of holes, thereby preventing the failure of the PR development. CONSTITUTION: A development solution nozzle device includes a plurality of supply tubes(101) for supplying a development solution, a development solution spraying nozzle(103) for spraying the supplied development solution, a single bar-shaped spacer(105) for distributing a development solution supply pressure to the entire nozzle and discharging the development solution, holes(109) formed in a line along the spacer for discharging the development solution via the spacer, and a stage(111) for supporting a substrate coated with PR at a lower part of the nozzle.
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