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发明名称
使用一组至少两个雷射脉冲来处理记忆体链路
摘要
一组(50)雷射脉冲(52)被用来切割记忆体或其他积体电路晶片中的导电链路(22)。该组(50)的周期最好短于500ns;且该组(50)中的每个雷射脉冲(52)的脉冲宽度最好在约0.1ps至30ns的范围内。该组(50)以传统雷射定位系统(62)可被视为单一"脉冲",以执行移动中的链路移除,而不需每当雷射系统(60)在每个链路(22)上诱发该组(50)雷射脉冲(52)时即停止。传统红外线波长或其谐波可加以使用。
申请公布号
TW200304205
申请公布日期
2003.09.16
申请号
TW091136366
申请日期
2002.12.17
申请人
伊雷克托科学工业股份有限公司
发明人
宋永隆;爱德华J 史黄生;李察S 哈瑞司
分类号
H01L21/78
主分类号
H01L21/78
代理机构
代理人
林镒珠
主权项
地址
美国
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