发明名称 DEVICE FOR MEASURING HUMIDITY EXHAUST DEFORMATION AMOUNT
摘要 PROBLEM TO BE SOLVED: To measure the humidity exhaust deformation amounts of a plurality of test pieces at the same time.SOLUTION: A humidity exhaust deformation amount measurement device 1 comprises: a test piece set unit 20 in which a plurality of previously moisture-absorbed test pieces 21 and a reference piece 22 are set; a dry box 10 having a plurality of laser interferometers 60, each of which is disposed face to face on each individual test piece 21 and one end face E1 of the reference piece 22; and a laser beam emission device 40 disposed on the outside of the dry box 10. A light passage part 10A is formed in the wall part 10W of the dry box 10, and there are provided inside the dry box 10 a light branching optical system 50 for branching a laser beam L and making it incident on each individual laser interferometer 60, a plurality of first mirrors 31 each of which is fitted to each individual test piece 21 and one end face E1 of the reference piece 22, and a plurality of second mirrors 32 each of which is fitted to each individual test piece 21 and the other end face E2 of the reference piece 22.SELECTED DRAWING: Figure 1
申请公布号 JP2016206018(A) 申请公布日期 2016.12.08
申请号 JP20150088276 申请日期 2015.04.23
申请人 NEC CORP 发明人 IKETA TAKAHIRO;HAMADA KAZUO;EZOE RYOSUKE
分类号 G01N21/84 主分类号 G01N21/84
代理机构 代理人
主权项
地址