发明名称 TABULAR OBJECT DIVIDING DEVICE, PROCESSING DEVICE AND TABULAR OBJECT DIVIDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a tabular object dividing device capable of efficiently dividing a tabular object, a processing device and a tabular object dividing method.SOLUTION: A cover sheet C that does not have elasticity is stuck to a tabular object unit U and a tabular object W in the tabular object unit U that passes a first support part 711 and a second support part 712 is pressed in a Z axis direction by a pressing part 731. Since there is a step between the first support part 711 and the pressing part 731, when the tabular object W passes the first support part 711, the tabular object W can be efficiently divided along a predetermined dividing line at a support point of the first support part 711.SELECTED DRAWING: Figure 4
申请公布号 JP2016207943(A) 申请公布日期 2016.12.08
申请号 JP20150090726 申请日期 2015.04.27
申请人 DISCO ABRASIVE SYST LTD 发明人 HATTORI ATSUSHI
分类号 H01L21/301;B23K26/53;B28D5/00 主分类号 H01L21/301
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