INFRARED HEATER AND INFRARED PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To enlarge a temperature difference between a heating element and a filter part during use.SOLUTION: An infrared heater 10 comprises: a heating element 40 which radiates an infrared ray when heated, and is capable of absorbing an infrared ray of a predetermined reflection wavelength region; and a filter part 50 that is disposed away from the heating element 40 while interposing a first space 47 which is open to an external space, therebetween. The filter part 50 includes: at least one or more transmission layers that transmit at least a part of infrared rays from the heating element 40; and a reflection part 55 that reflects the infrared ray of the reflection wavelength region towards the heating element 40. The filter part 50 may also include as transmission layers: a first transmission layer 51 that transmits the infrared ray of the reflection wavelength region; and a second transmission layer 52 that reflects the infrared ray of the reflection wavelength region and transmits at least a part of infrared rays transmitted through the first transmission layer 51 among infrared rays from the heating element 40.SELECTED DRAWING: Figure 2