| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator in which a position of an output beam is conformable to a laser beam input position demanded by a processing system side without using a surplus external mirror. SOLUTION: A 3-axis orthogonal type gas laser oscillator 1 comprises an optical cavity 13 having a laser optical path which goes and returns in a Z- shaped form in a discharge pumping part 7. The optical cavity is constituted by a rear mirror MR on one side of the Z-shaped laser optical path, a first fold back mirror M<SB>1</SB>and a second fold back mirror M<SB>2</SB>for leading laser beams from the rear mirror, a third fold back mirror M<SB>3</SB>for leading the laser beams from the second fold back mirror in a 45°-oblique direction with respect to a vertical direction, and a fourth fold back mirror M<SB>4</SB>for leading the laser beams from the third fold back mirror to an output mirror MO provided on the one side through a space except the discharge pumping part. COPYRIGHT: (C)2004,JPO
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