| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection tool capable of performing electric characteristic inspection high in accuracy even in a small inspection space.SOLUTION: A semiconductor inspection tool includes: a slide tool main body part 10a having a side part 13 and a bottom part 12 and storing a semiconductor element 20 which is an element to be inspected; a slide tool 10 electrically connected to an electrode terminal 21 of the semiconductor element 20 and having an electrode 14 arranged on the external surface of the side part 13 ; a slide reception tool main body part 1a including an inclined face 2a capable of sliding the slide tool 10 via the bottom part 12; and a slide reception tool 1 having a probe pin 4 arranged on the downstream side of the sliding direction and contacting an electrode 14 according to the slide and performing an electric characteristic inspection of the semiconductor element 20.SELECTED DRAWING: Figure 1 |
