| 摘要 |
PROBLEM TO BE SOLVED: To reduce an area exclusively required for the orientation, i.e., the direction of a work so that arms face both sides of the work in a non-contact manner. SOLUTION: In an articulated robot 1 in which a first arm 3 and a second arm 4 are rotatably connected to a hand part 6 of a rotary table or the like to hold a work 5 such as a wafer, the work 5 at a first position of a cassette or the like is taken out by the hand part 6, and temporarily placed at a temporary placement position, the work 5 is re-taken by the hand part 6, and installed on the second position 10 of a process device or the like, a sensor 25 to detect a part 5a to be detected such as a notch formed in the work 5 is provided in an area of rotation of the work 5 by the first arm 3 and the second arm 4, and a temporary placement hand part 26 forming the temporary placement position is integrated with a base. The part 5a to be detected is detected by the sensor 25 while rotating the work 5 by the first arm 3 and the second arm 4 while the work 5 is held by the hand part 6, the holding angle θe of the work 5 is detected, and the work 5 is temporarily placed on the temporary placement hand part 26 at a predetermined angle based on the holding angle θe. COPYRIGHT: (C)2004,JPO |
