| 摘要 |
PROBLEM TO BE SOLVED: To uniformly and surely form a plated layer up to the deep bottom of a fine recessed part. SOLUTION: In a plating method, a nozzle housing having an injection nozzle capable of injecting a liquid is provided, and the nozzle housing accommodating a plating material is arranged in such a manner that the liquid injected into a plating tank from the injection nozzle collides with a material to be plated, which is accommodated in the plating tank. Thereafter, the plating liquid is supplied into the nozzle housing under pressure while connecting the plating material and the material to be plated to an electric source. COPYRIGHT: (C)2004,JPO
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