| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe electron microscope (SFM) facilitating a change of probes while dispensing with adjustment for positioning a deflection detector after a change of probe. SOLUTION: This scanning probe electron microscope 100 has a probe 101 removably mounted on a head 108 by a kinematic mounting technique. A motor-driven unstacked coarse x-y axis movable stage 116 is disposed on a base material 114. A motor-driven coarse biaxial movable stage 112 positions the head relative to the base material and enables the adjustment of the height, lateral slant, and longitudinal slant, of the probe. A scanner 118 includes x, y, and z axis specimen position detectors, and the outputs of the detectors are also connected to a controller 110 through a feedback loop for improving the performance of the microscope. An optical image observation assembly 124 provides a combined image of a concentric image with an oblique perspective image of a cantilever 102 and a specimen 104. COPYRIGHT: (C)2004,JPO |
