发明名称 Method for producing a component having submerged connecting areas
摘要 To expose a submerged bondable terminal pad in a component that includes at least two substrates which are joined with each other, it is proposed that grooves of relatively shallow depth be provided on the connecting surface of the second substrate before the two substrates are joined. After the two substrates are joined, incisions are made opposite the grooves which open the grooves from the back side. The cutouts to be removed are defined between two grooves.
申请公布号 AU2003238463(A8) 申请公布日期 2004.02.02
申请号 AU20030238463 申请日期 2003.06.04
申请人 AUSTRIAMICROSYSTEMS AG 发明人 ROBERT CSERNICSKA;WALTER DRAXLER;MANFRED BRANDL
分类号 B81B7/00;B81C1/00;H01L21/98;(IPC1-7):B81B7/00;H01L23/10 主分类号 B81B7/00
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