| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump allowing a reduction in impact of a rotor 2, when destroyed. SOLUTION: The hybrid turbo-molecular pump comprises a turbo pump mechanism using a turbo mechanism T for exhausting molecules and a screw groove pump mechanism constituted by the rotor 2 and a fixed cylinder 1DN. Depth portions of a screw groove 1N in the fixed cylinder 1DN have the same diameter in all regions in the direction of the axial center of the fixed cylinder 1DN. This eliminates the possibility of deforming and destroying the pump mechanism as a result of the fly of fragments of a rotating cylindrical portion 2DN, when destroyed, to the side of the turbo-molecular pump. COPYRIGHT: (C)2004,JPO
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