| 发明名称 |
Method and arrangement for heat treatment of flat objects |
| 摘要 |
<p>The objects (10) are arranged on carriers (20) and transported continuously through a heat treatment system. The objects are arranged flatly or almost flatly on carriers which cover the underside of the objects completely or almost completely. The carriers are aligned on a transport device so that they have a closed surface with a widthwise extension in transport planes of the transport device. An Independent claim is included for an apparatus for heat treatment of flat objects.</p> |
| 申请公布号 |
EP1026724(A3) |
申请公布日期 |
2004.02.04 |
| 申请号 |
EP20000101555 |
申请日期 |
2000.01.27 |
| 申请人 |
RWE SOLAR GMBH |
发明人 |
HEYER, FRITZ;ROTH, PETER |
| 分类号 |
H01L21/683;H01L21/00;H01L21/22;H01L21/31;H01L31/04;H01L31/18;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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