| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a diffraction optical element which has high shape precision and has small probability of deformation. SOLUTION: In this manufacturing method, a molding die 20 is fitted to a holding frame 21 and a photocurable resin 22 is dripped by a specified amount on the molding surface of the molding die 20 by an unillustrated dispenser. After the photocurable resin 22 spreads over the entire molding surface, the pressure in a vacuum device where a molding device is placed is reduced to about 10 mmHg for defoaming. Then a very small amount of a photocurable resin is dripped in the center of a glass substrate 23 and brought into contact with the photocurable resin 22 having spread over the molding die 20 for the 1st time. Then the glass substrate 23 is slowly lowered and held at the specified position where it abuts against an injector 24. COPYRIGHT: (C)2004,JPO |
