| 摘要 |
PROBLEM TO BE SOLVED: To provide a regulating method capable of regulating a prism stage on which cross dichroic prisms are to be installed by easy operation with high accuracy. SOLUTION: The laser beam from a light source 4 for regulation is projected to the cross dichroic prisms 2 and the reflected beam is deflected 90°by a pentagonal prism 5 and is projected to a screen 3. The prism stage is rotated around a Z-axis and is so regulated that the beam projected to the screen 3 is projected onto the reference axis of the screen by which the installation surface of the prism 2 is made exactly flush with a plane consisting of the Z-axis and X-axis. Next, the laser beam from the light source 4 for regulation is deflected 270°by the three pentagonal prisms and is projected to the prisms 2 and the position in the X-axis direction and the rotating angle around the Y-axis are so regulated that the beam reflected by the same are passed through a pinhole and is aligned with the center of the screen 3. COPYRIGHT: (C)2004,JPO |
