HOLDER FOR SEMICONDUCTOR MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a holder for a semiconductor manufacturing system by which no electric leakage or spark occurs on electrode terminals and leads for supplying electric power to heating resistors which are embedded in the holder and heat uniformity within±1.0 % in the holder can be obtained. SOLUTION: The holder for a semiconductor manufacturing system is provided with a ceramic holder 1 which holds a workpiece 10 on its surface and is provided with heating resistors 2 for heating the workpiece 10 and a support member 6 which supports the ceramic holder 1 in a chamber 8. The electrode terminals 3 and the leads 4 of the heating resistors 2 are housed in a tubular insulating pipe 5. The ceramic holder 1 is supported by only the support member 6 or by the support member 6 and the insulating pipe 5. COPYRIGHT: (C)2004,JPO