| 摘要 |
PROBLEM TO BE SOLVED: To provide an axially magnetic levitation type rotary motor and a rotary apparatus using this motor with high accuracy, capable of maintaining stable rotation without any risk such as axial runout during high-speed rotation, by organically linking position control in radial and axial directions for magnetic levitation control, rotation control, and tilt control. SOLUTION: In this axially magnetic levitation type rotary motor having a rotor 4 disposed so as to freely levitate and rotate between a pair of upper and lower stators 1, 7 disposed so as to face each other in the axial direction of a vertical shaft and having electromagnets, radial control of the rotor 4 is performed by an upper stator 1, and the magnetic-levitation rotation control and the tilt control of the rotor 4 are performed by the lower stator 7. The position control and the tilt control in the radial direction are performed on both sides in the axial direction of the rotor 4, and the magnetic levitation control is performed relative to the lower stator 7. Therefore, smooth rotation can be obtained with less vibration such as axial runout without need for mechanical support and functioning a part of the magnetic levitation force at the lower stator 7 as the rotation control force, thus performing efficient control. COPYRIGHT: (C)2004,JPO |
