| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a polishing piece should be prepared for each of various probe cards in polishing the probe cards having variation in the shape of a probe, and further as the probe is directly kept into contact with the hard polishing piece, the probe is ground down and should be frequently replaced. SOLUTION: This grinding device comprises a lapping film fixing mechanism for curling and folding a strip-shaped lapping film into two without making a fold line, and fixing the overlapped both ends, and a driving mechanism for sliding the fixing mechanism vertically to the direction of the probe. COPYRIGHT: (C)2004,JPO |
