X-RAY GENERATOR, X-RAY ALIGNER, AND X-RAY FILTER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray generator by which irregular exposure never occurs on a mask or a resist even when the thickness of a filter has irregularity and by which the filter is never broken due to a thermal load. SOLUTION: The X-ray generator is provided with an X-ray source and the filter 100 through which X-rays radiated from the X-ray source pass. In order to move the passing-through position of the X-rays on the filter 100 according to need, the driving mechanisms 102, 103 and 104 of the filter 100 are provided. COPYRIGHT: (C)2004,JPO