发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To solve the problem that an SOI (silicon on insulator) type semiconductor device cannot cope with a transistor making a source/drain region and a channel region different potential, and can cope with only one of two kinds of power source wiring. SOLUTION: The semiconductor device has a low resistant wiring layer 13 extended to be embedded in a substrate, and a plurality of element regions 14 formed to be mutually separated while they are brought into contact with the embedded wiring layer 13. The circuit element is formed in each element region. The embedded wiring layer preferably uses a metal. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004111634(A) 申请公布日期 2004.04.08
申请号 JP20020271807 申请日期 2002.09.18
申请人 NEC MICRO SYSTEMS LTD 发明人 KATO TOSHIKAZU
分类号 H01L23/52;H01L21/3205;H01L21/74;H01L21/762;H01L21/8234;H01L21/8238;H01L21/84;H01L23/535;H01L27/01;H01L27/08;H01L27/088;H01L27/092;H01L27/12;H01L29/786;H01L31/109;(IPC1-7):H01L29/786;H01L21/320;H01L21/823 主分类号 H01L23/52
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