Radiation-sensitive resin composition, polymer and compound

摘要

A radiation-sensitive resin composition includes a polymer, an acid generating agent, and an organic solvent. The polymer includes a first structural unit derived from a compound represented by a formula (1), and a second structural unit derived from a compound represented by a formula (2). R1 represents an organic group having a valency of (a+2) that represents a ring structure having 3 to 8 carbon atoms together with the carbon atom constituting a lactone ring. R2 represents a fluorine atom, a hydroxyl group, an organic group having 1 to 20 carbon atoms or the like.;

主权项

1. A radiation-sensitive resin composition comprising:
a first polymer comprising a first structural unit derived from a compound represented by formula (1) or formula (1-47), and a second structural unit derived from a compound represented by formula (2); an acid generating agent; and an organic solvent, wherein, in the formula (1), R1 represents an organic group having a valency of (a+2) that represents a ring structure having 3 to 8 carbon atoms together with the carbon atom constituting the lactone ring; R2 represents a fluorine atom, a hydroxyl group, a chain hydrocarbon group having 1 to 20 carbon atoms, an alkoxy group having 1 to 5 carbon atoms, a methoxy carbonyl group, an ethoxy carbonyl group, an oxacycloalkyloxy group having 2 to 10 carbon atoms, or —R′—X—R″, a part or all of hydrogen atoms of the chain hydrocarbon group having 1 to 20 carbon atoms optionally being substituted with a halogen atom, a cyano group, a carboxyl group, a hydroxyl group or a thiol group,
wherein R′ represents a single bond or a hydrocarbon group having 1 to 10 carbon atoms, R″ represents an alkylsilyl group having 1 to 20 carbon atoms, and X represents —O— or —NH—, andwherein at least one group of R1 and R2 has a hetero atom or a halogen atom; a is an integer of 1 to 6,
wherein in a case where a is 2 or greater, each R2 is identical or different, and at least two Res optionally taken together represent a ring structure; R3 represents a hydrogen atom or a methyl group; R4 represents a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 6 carbon atoms; and R5 represents a hydrogen atom, or R5 and R4 taken together represent a cycloalkanediyl group having 3 to 8 carbon atoms together with the carbon atom to which R5 and R4 bond, and in the formula (2), R6 represents a hydrogen atom or a methyl group; R7, R8 and R9 each independently represent an alkyl group having 1 to 6 carbon atoms, or R7 and R8 taken together represent a ring structure together with the carbon atom to which R7 and R8 bond and R9 represents an alkyl group having 1 to 6 carbon atoms, wherein a hydrogen atom of the alkyl group represented by R7, R8 or R9 is not substituted or substituted.