LIQUID DROP DISCHARGING APPARATUS, LIQUID DROP DISCHARGING METHOD, FILM FORMING APPARATUS, FILM FORMING METHOD, DEVICE MANUFACTURING METHOD, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a liquid drop discharging apparatus and a method for the same capable of efficiently carrying out workpiece treatment by enabling various liquid drop discharge of a functional liquid without causing the degradation of printing quality, and to provide a film forming apparatus, a film forming method, a device manufacturing method and an electronic equpment.

SOLUTION: The liquid drop discharging apparatus is equipped with multiple types of liquid drop discharging heads 8 (a 1st discharging head 8a-3rd discharging head 8c) having mutually different specifications, a plurality of dummy load circuits 31a-31c for applying electric load to the liquid drop discharging heads 8, and analog switches 32a-32c, 33a-33c for switching, in accordance with the type of the operating liquid drop discharging head 8, the dummy load circuits connected to the liquid drop discharging heads 8.

COPYRIGHT: (C)2004,JPO