摘要 |
PURPOSE: A device and a method for detecting a rotation angle and a device for detecting torque are provided to prevent an output waveform of a magnetic sensor from changing by uniformly making electrical characteristics of the semiconductor MR elements. CONSTITUTION: A device for detecting a rotation angle includes a target and a plurality of magnetic sensors(A1,B1,A2,B2,A3,B3). The target has a magnetic member integrally and rotatably connected to a rotary member. The magnetic sensors are arranged in order to confront the magnetic member and output signals according to rotation of the rotary member. Each of the magnetic sensors includes a semiconductor MR element. The semiconductor MR elements are formed over and integrally with a common cell of a semiconductor wafer. The semiconductor MR elements are formed at circumferential positions different from each other with respect to the rotary member on the common cell.
|