发明名称 SEMICONDUCTOR MANUFACTURING SYSTEM
摘要 PROBLEM TO BE SOLVED: To prevent to affect to the supply of compressed air to another solenoid valve head and permit the retention of the operating positions of pneumatic components even during the exchanging work of a solenoid valve head. SOLUTION: A multitude of solenoid valve heads 15 are detachably attached to one set of a unit body 14 and a multitude of pneumatic components 2 are connected to the corresponding solenoid valve heads 15. In the unit main body 14, branch flow passages 16b, connected respectively to a plurality of solenoid valve heads 15 under mounting condition while being supplied with compressed air are provided with a fluid supply closing valve 17 while inflow and outflow passages 18 in the unit, which are communicated with the pneumatic components 2 corresponding respectively to respective solenoid valve heads 15 under the mounting condition are provided with fluid inflow and outflow closing valves 19. Even during the exchanging works of one part of the solenoid valve heads 15, the supply of compressed air to the other solenoid valve heads 15 will not be affected by closing the corresponding fluid supply closing valves 17 and the fluid inflow and outflow closing valves 19 while the operating positions of the pneumatic components 2 are also retained. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004140138(A) 申请公布日期 2004.05.13
申请号 JP20020302688 申请日期 2002.10.17
申请人 RENESAS TECHNOLOGY CORP;RENASAS NORTHERN JAPAN SEMICONDUCTOR INC 发明人 NARITA HIDEMI
分类号 H01L21/3065;(IPC1-7):H01L21/306 主分类号 H01L21/3065
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